OPTIcoat SST20 - Spin Coating

OPTIcoat SST20

Coating System with "Covered Chuck" within process:

• Stand - Alone Spin Coating System with "Covered Chuck" technology" for Wafers up to Ø 8" (Ø 200 mm) and substrates up to 6" x 6" (150 mm x 150 mm), for traditional open bowl or covered chuck spinning

System configuration

• Stand - Alone cabinet with all process modules integrated
• Spinner system with "Covered Chuck" technology and automatic substrate pin lift
• Multi piece process bowl (easily dismountable for cleaning purposes) with splash ring
• Industrial full-colour touchscreen HMI
• USB interface
• PC-based recipe management and backup software
• Digital documentation and operating manuals available for download
• Requires at least one chuck (Not included !)

Technical data

• Voltage: UAC= 230 V / N / PE / 50 Hz (60 Hz)/ 16A
• Motor-Speed: 1 up to 10,000rpm in 1rpm steps
• Motor-Acceleration ramp: 1 up to 50,000 rpm/sec in steps 1rpm/sec
• Spinning time: 1 up to 999 s - Adjustable in 0.1 s steps
• Substrate size: Up to Ø 8" (Ø 200 mm) or 6" x 6" (150 mm x 150 mm)
• Process bowl: Standard made of Polypropylene (PP)
• Process exhaust: Outer diameter OD 110 mm, 200 m3/h
• Cabinet exhaust: Outer diameter OD 110 mm, 200 m3/h
• Drain: 5 liter waste tank and high-level sensor, inside the cabinet
• Compressed air: Clean Dry Air (CDA) 8 ± 2 bar
• Vacuum: -0.8 ± 0.2 bar
• Nitrogen (N2), optional: 4.0 ± 0.5 bar
• CE marked system

Chuck: Option
Dispense: Option
Nozzle: Option