OPTIhot SHT20+ - Hotplate

OPTIhot SHT20+

stand alone Hotplate System for typical lithography baking applications:

• Stand - Alone Hotplate System for wafer up to Ø 8" (Ø 200mm)
  and substrates up to 6" x 6" (150mm x 150mm)

System configuration

• Stand-Alone Cabinet with integrated Hotplate and controller
• Recipe programmable lifting pins (proximity) for 2" - 8" wafer
• Recipe programmable Nitrogen (N2) blow
• Industrial full-colour touchscreen HMI
• Preset and calibrated Temperature Controller
• PC-based recipe management and backup software
• Including am Digital documentation and operating manuals available for download as download

Technical data

• Voltage: UAC= 110 V / N / PE / 60 Hz / 16A or UAC= 230 V / N / PE / 50 Hz / 16A
• Temperature range: Up to 250°C - Adjustable in 0.1°C steps
• Hotplate time: 1 up to 999 s - Adjustable in 0.1 s steps
• Lifting pins (Proximity): From Ø 2" up to Ø 8" - Programmable in 0.1 mm steps
• Substrate Size: Up to Ø 8" (Ø 200 mm) or 6" x 6" (150 mm x 150 mm)
• Process exhaust: Outer diameter OD 110 mm, 30m3/h
• Cabinet exhaust: Outer diameter OD 110 mm, 200m3/h
• Compressed air: Clean Dry Air (CDA) 8 ± 2 bar
• Vacuum: -0.8 ± 0.2 bar
• Nitrogen (N2): 4.0 ± 0.5 bar
• CE marked system