OPTIspin SST20 - Spin Coating and Cleaning

OPTIspin SST20

Spinner module for coating and cleaning within process:
OPTIspin SST 20

• Stand - Alone Spinner System for Coating, Cleaning or Developing applications for wafer up to Ø 8" (Ø 200 mm) and substrates up to 6" x 6" (150 mm x 150 mm)

System configuration

• Stand - Alone cabinet with all process modules integrated
• Multi piece process bowl (easily dismountable for cleaning purposes) with splash ring
• 19" controller unit with USB interface
• Spinner system with process bowl cover (hardware interlock secured)
• Multi piece process bowl (easily dismountable for cleaning purposes) with splash ring Industrial full-colour touchscreen HMI
• Industrial full-colour touchscreen HMI
• PC-based recipe management and backup software - For more comfortable recipe writing and storage
• Digital documentation and operating manuals available for download as download
• Requires at least one chuck (Not included !)

Technical data

• Voltage: UAC= 230 V / N / PE / 50 Hz (60 Hz) / 16A
• Motor-Speed: 1 up to 10,000rpm* in 1rpm steps
• Motor-Acceleration ramp: 1 up to 50,000 rpm/sec* in steps 1rpm/sec (depending on substrate size and load)
• Spinning time: 1 up to 999 s - Adjustable in 0.1 s steps
• Substrate size: Up to Ø 8" (Ø 200 mm) or 6" x 6" (150 mm x 150 mm)
• Process bowl Standard of Polypropylene (PP)
• Process exhaust: Outer diameter OD 110 mm, 200m3/h
• Drain: 5 liter waste tank and high-level sensor, inside the cabinet
• Compressed air: Clean Dry Air (CDA) 8 ± 2 bar
• Vacuum: -0.8 ± 0.2 bar
• Nitrogen (N2): 4.0 ± 0.5 bar
• CE marked system

Chucks: Option

Dispense: Option

Nozzle: Option