OPTIspray ST30i - Spray Coating

OPTIspray ST30i

Spray Coating System within process:

Spray Coater - OPTIspray ST30i

• Stand - Alone Spray Coating System for Wafers up to Ø 12” (Ø 300 mm) and Substrates up to 9” x 9” (225 mm x 225 mm)

System configuration

• Stand - Alone cabinet with all process modules integrated
• Dominus spray coater process chamber with safety door
• Including one programmable media arm with micro nozzle
• Programmable Nozzle (needle adjustment)
• Emergency Stop Button
• Industrial full-colour touchscreen HMI
• USB interface
• PC-based recipe management and backup software
• Digital documentation and operating manuals available for download
• Requires at least one chuck (Not included !)

Technical data

• Voltage: UAC= 3 x 400 V / N/PE/50 Hz /16A
• Substrate size: Up to Ø 12” (Ø 300 mm) or 9” x 9” (225 mm x 225 mm)
• Chamber /HP exhaust #1+2: 2 x outer diameter OD 110 mm, each 200m3/h
• Cabinet exhaust: Outer diameter OD 110 mm, 200m3/h
• Controller exhaust: Outer diameter OD 110 mm, 200m3/h
• Drain: 5 liter waste tank and high-level sensor inside the cabinet
• Compressed air: Clean Dry Air (CDA) 8 ± 2 bar
• Vacuum: -0.8 ± 0.2 bar
• Nitrogen (N2) Optional: 4.5 ± 0.5 bar
• CE marked system