Single Wafer Processing
Innovative Process &
Inspection Equipment
For semiconductors and solar industry. High precision, maximum reliability – engineered by experienced professionals.
200+
Installations worldwide
7
Markets
10+
Years of experience
24/7
Service & Support
About Robotechnik
Since 2013, we have been developing and manufacturing inspection automation and process equipment for the semiconductor and solar industries.
Visual Inspection
Precision inspection systems for wafer quality control in solar and semiconductor manufacturing.
Process Equipment
Spin Coater, Developer and Etcher – Single Wafer Processing at the highest level.
Global
Customers worldwide, strong partner network, local service and support.
Our Products
Complete wafer processing solutions – from inspection through coating to etching.
Inspection Systems
High-resolution visual inspection of solar and semiconductor wafers. Real-time defect detection.
Learn more →Spin Coater
Uniform coating of single wafers. Precise thickness control and reproducible results.
Learn more →Service
Official Service for Leading Brands
We provide official service for all machines and systems from the following companies:
- Degotec GmbH
- ATMgroup GmbH
- ATMvision AG
- ATMsse GmbH
- Sister Semiconductor (SSE)
- QSSE
Service & Maintenance
Maintenance, repair, modifications and upgrades for your equipment.
service@robo-technik.eu