Semiconductor manufacturing
Primary market for single wafer processing, lithography support, coating, cleaning, HMDS, hotplate and wet process modules.
Single Wafer Processing
Process Equipment forSemiconductor Manufacturing
High-precision systems for coating, cleaning, hotplate, HMDS, wet etching and fully automated single wafer processing.
Product families
Single Wafer Processing
Process solutions from cleaning, coating and HMDS systems to OPTIwet wet and etching processes as well as fully automated cluster platforms.
Spray Coating
Spray coating systems for controlled coating processes on wafers and substrates.
Automated Cluster Processes
Automated cluster systems that combine multiple process modules in one platform.
Spin Coating
Precision spin coating systems for uniform and reproducible coating results.
Heating & HMDS
Hotplates and HMDS systems for controlled thermal wafer processing.
Spin Processing
Flexible spin coating and cleaning systems for single-wafer processing.
Wet Processing & Etching
Spin wet process systems for cleaning, development, etching and wet processing.
Experience
Reliable systems for precise processes
Our systems are built for reproducible results, robust automation and service support that keeps production availability in focus.
200+
Installations worldwide
7
Markets
10+
Years of experience
24/7
Service & support
Markets and applications
MEMS & sensors
Process platforms for small-batch and production environments with demanding substrate handling requirements.
Microelectronics & power devices
Wet processing, coating and thermal process solutions for Si, SiC, GaN, GaAs and related substrates.
Advanced packaging & displays
Cluster and standalone systems for larger substrates, EWLB, panel-related processes and precision coating tasks.
Optics, photonics & advanced materials
Flexible process equipment for specialty substrates, R&D and technology development.
Pharma & life-science process development
Selected coating, cleaning and surface treatment applications where controlled substrate processes are required.
Official service for leading brands
Interested in our solutions?
Let us discuss your process requirements
Contact our sales team for individual consultation on systems, process modules, upgrades and service.
200+
Installations
7
Markets
24/7
Service
DE
Singen