Microstructure of a semiconductor die

Product Gallery

Single wafer processing systems

Explore active and discontinued Robotechnik systems for single wafer processing.

Processes

Multiple selection possible

Maximum product diameter

Equipment type

43 products shown

48 products in catalogue

OPTIwet ST75 - Spin Wet
OPTIwetSemi automatic equipmentCleaningEtching+2

OPTIwet ST75 - Spin Wet

Stand alone spinner for wet process

Max. product diameter: Ø 750 mm

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OPTIwet ST60 - Spin Wet
OPTIwetSemi automatic equipmentCleaningEtching+2

OPTIwet ST60 - Spin Wet

Stand alone spinner for wet process

Max. product diameter: Ø 600 mm

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OPTIwet ST30 - Spin Wet
OPTIwetSemi automatic equipmentCleaningEtching+2

OPTIwet ST30 - Spin Wet

Stand alone spinner for wet process

Max. product diameter: Ø 300 mm

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OPTIspin ST32+ - Spin Coating
OPTIspinSemi automatic equipmentCoatingCleaning+3

OPTIspin ST32+ - Spin Coating

Stand alone spinner system for Coating including process

Max. product diameter: Ø 300 mm

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OPTIspin ST32 - Spin Coating
OPTIspinSemi automatic equipmentCoatingCleaning+3

OPTIspin ST32 - Spin Coating

Stand alone spinner for coating including process

Max. product diameter: Ø 300 mm

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OPTIspin ST30 - Spin Coating
OPTIspinSemi automatic equipmentCoatingCleaning+2

OPTIspin ST30 - Spin Coating

Stand alone spinner system for Coating including process

Max. product diameter: Ø 300 mm

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OPTIspin ST23+ - Spin Coating and Cleaning
OPTIspinSemi automatic equipmentCoatingCleaning+4

OPTIspin ST23+ - Spin Coating and Cleaning

Stand alone spinner system for coating and cleaning including process

Max. product diameter: Ø 200 mm

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OPTIspin ST23 - Spin Coating and Cleaning
OPTIspinSemi automatic equipmentCoatingCleaning+4

OPTIspin ST23 - Spin Coating and Cleaning

Stand alone spinner system for coating and cleaning including process

Max. product diameter: Ø 200 mm

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OPTIspin ST22+ - Spin Coating and Cleaning
OPTIspinSemi automatic equipmentCoatingCleaning+3

OPTIspin ST22+ - Spin Coating and Cleaning

Stand alone spinner system for coating and cleaning including process

Max. product diameter: Ø 200 mm

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OPTIspin ST22 - Spin Coating and Cleaning
OPTIspinSemi automatic equipmentCoatingCleaning+3

OPTIspin ST22 - Spin Coating and Cleaning

Stand alone spinner for coating and cleaning including process

Max. product diameter: Ø 200 mm

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OPTIspin ST20 - Spin Coating and Cleaning
OPTIspinSemi automatic equipmentCoatingCleaning+2

OPTIspin ST20 - Spin Coating and Cleaning

Stand alone spinner system including process

Max. product diameter: Ø 200 mm

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OPTIspin SST20 - Spin Coating and Cleaning
OPTIspinSemi automatic equipmentCoatingCleaning+2

OPTIspin SST20 - Spin Coating and Cleaning

Spin coating and cleaning system inclunding process

Max. product diameter: Ø 200 mm

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OPTIspin SB30 - Spin Coating
OPTIspinSemi automatic equipmentCoatingCleaning+2

OPTIspin SB30 - Spin Coating

Bench mounted spinner system including process

Max. product diameter: Ø 300 mm

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OPTIspin SB20 - Spin Coating and Cleaning
OPTIspinSemi automatic equipmentManual equipmentCoatingCleaning+2

OPTIspin SB20 - Spin Coating and Cleaning

Spin coating and cleaning system including process

Max. product diameter: Ø 200 mm

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OPTIhot VB20 - Hotplate HMDS
OPTIhotSemi automatic equipmentManual equipmentPrimingBaking

OPTIhot VB20 - Hotplate HMDS

Bench mounted HMDS hotplate

Max. product diameter: Ø 200 mm

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OPTIhot SVT20 - Hotplate HMDS
OPTIhotSemi automatic equipmentManual equipmentPrimingBaking

OPTIhot SVT20 - Hotplate HMDS

Stand alone hotplate HMDS

Max. product diameter: Ø 200 mm

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OPTIhot SHT30+ - Hotplate
OPTIhotSemi automatic equipmentManual equipmentBaking

OPTIhot SHT30+ - Hotplate

Stand alone hotplate

Max. product diameter: Ø 300 mm

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OPTIhot SHT20+ - Hotplate
OPTIhotSemi automatic equipmentManual equipmentBaking

OPTIhot SHT20+ - Hotplate

Stand alone hotplate

Max. product diameter: Ø 200 mm

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OPTIhot SHT20 - Hotplate
OPTIhotSemi automatic equipmentManual equipmentBaking

OPTIhot SHT20 - Hotplate

Stand alone hotplate

Max. product diameter: Ø 200 mm

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OPTIhot HB30+ - Hotplate
OPTIhotSemi automatic equipmentManual equipmentBaking

OPTIhot HB30+ - Hotplate

Bench mounted hotplate system including process

Max. product diameter: Ø 300 mm

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OPTIhot HB20+ - Hotplate
OPTIhotSemi automatic equipmentManual equipmentBaking

OPTIhot HB20+ - Hotplate

Bench mounted hotplate system including process

Max. product diameter: Ø 200 mm

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OPTIhot HB20 - Hotplate
OPTIhotSemi automatic equipmentManual equipmentBaking

OPTIhot HB20 - Hotplate

Bench mounted hotplate system including process

Max. product diameter: Ø 200 mm

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OPTIcoat ST75 - Spin Coating
OPTIcoatSemi automatic equipmentCoatingSpinning

OPTIcoat ST75 - Spin Coating

Stand alone spinner for coating including process

Max. product diameter: Ø 750 mm

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OPTIcoat ST60 - Spin Coating
OPTIcoatSemi automatic equipmentCoatingSpinning

OPTIcoat ST60 - Spin Coating

Stand alone spinner for coating including process

Max. product diameter: Ø 600 mm

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OPTIcoat ST32+ - Spin Coating
OPTIcoatSemi automatic equipmentCoatingBaking+1

OPTIcoat ST32+ - Spin Coating

Stand alone spinner for coating including process

Max. product diameter: Ø 300 mm

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OPTIcoat ST32 - Spin Coating
OPTIcoatSemi automatic equipmentCoatingBaking+1

OPTIcoat ST32 - Spin Coating

Stand alone spinner for coating including process

Max. product diameter: Ø 300 mm

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OPTIcoat ST30 - Spin Coating
OPTIcoatSemi automatic equipmentCoatingSpinning

OPTIcoat ST30 - Spin Coating

Stand alone spinner for coating including process

Max. product diameter: Ø 300 mm

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OPTIcoat ST23+ - Spin Coating
OPTIcoatSemi automatic equipmentCoatingPriming+2

OPTIcoat ST23+ - Spin Coating

Stand alone spinner for coating including process

Max. product diameter: Ø 200 mm

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OPTIcoat ST23 - Spin Coating
OPTIcoatSemi automatic equipmentCoatingPriming+2

OPTIcoat ST23 - Spin Coating

Stand alone spinner for coating including process

Max. product diameter: Ø 200 mm

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OPTIcoat ST22+ - Spin Coating
OPTIcoatSemi automatic equipmentCoatingSpinning

OPTIcoat ST22+ - Spin Coating

Stand alone spinner for coating including process

Max. product diameter: Ø 200 mm

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OPTIcoat ST22 - Spin Coating
OPTIcoatSemi automatic equipmentCoatingCleaning+2

OPTIcoat ST22 - Spin Coating

Stand alone spinner for coating including process

Max. product diameter: Ø 200 mm

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OPTIcoat ST20 - Spin Coating
OPTIcoatSemi automatic equipmentCoatingSpinning

OPTIcoat ST20 - Spin Coating

Stand alone spinner for coating including process

Max. product diameter: Ø 200 mm

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OPTIcoat SST20 - Spin Coating
OPTIcoatSemi automatic equipmentCoatingSpinning

OPTIcoat SST20 - Spin Coating

Stand alone spinner for coating including process

Max. product diameter: Ø 200 mm

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OPTIcoat SB30 - Spin Coating
OPTIcoatSemi automatic equipmentCoatingSpinning

OPTIcoat SB30 - Spin Coating

Bench mounted spinner system including process

Max. product diameter: Ø 300 mm

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OPTIcoat SB20 - Spin Coating
OPTIcoatSemi automatic equipmentCoatingSpinning

OPTIcoat SB20 - Spin Coating

Bench mounted spinner system including process

Max. product diameter: Ø 200 mm

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Maximus 806 - Automatic Cluster
MaximusFully automatic equipmentCoatingCleaning+7

Maximus 806 - Automatic Cluster

Automatic spinner for Coating including process and micro cluster system

Max. product diameter: Ø 200 mm

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Maximus 804 Lift-Off - Automatic Cluster
MaximusFully automatic equipmentCoatingCleaning+7

Maximus 804 Lift-Off - Automatic Cluster

Automatic lift-off cleaning spinner system including process and micro cluster system

Max. product diameter: Ø 200 mm

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Maximus 804 - Automatic Cluster
MaximusFully automatic equipmentCoatingCleaning+7

Maximus 804 - Automatic Cluster

Automatic spinner for Coating including process and micro cluster system

Max. product diameter: Ø 200 mm

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MAXIMUS 6003 - Automatic Cluster
MaximusFully automatic equipmentCoatingCleaning+7

MAXIMUS 6003 - Automatic Cluster

Automatic spinner for Coating including process and micro cluster system

Max. product diameter: Ø 600 mm

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Maximus 1203 - Automatic Cluster
MaximusFully automatic equipmentAutomatic Cluster

Maximus 1203 - Automatic Cluster

Automatic spinner for Coating including process and micro cluster system

Max. product diameter: Ø 300 mm

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DOMINUS Coater ST30i - Spray Coating
DOMINUSSemi automatic equipmentSpray Coating

DOMINUS Coater ST30i - Spray Coating

Stand alone spray coating system for coating including process

Max. product diameter: Ø 300 mm

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DOMINUS Coater ST22i - Spray Coating
DOMINUSSemi automatic equipmentSpray Coating

DOMINUS Coater ST22i - Spray Coating

Stand alone spray coating system for coating including process

Max. product diameter: Ø 200 mm

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DOMINUS Coater ST20i - Spray Coating
DOMINUSSemi automatic equipmentSpray Coating

DOMINUS Coater ST20i - Spray Coating

Stand alone spray coating system for Coating including process

Max. product diameter: Ø 200 mm

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