
Produktgalerie
Prozessanlagen für Single Wafer Processing
Entdecken Sie aktive und abgekündigte Robotechnik-Systeme für Single Wafer Processing.
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43 Produkte angezeigt
48 Produkte im Katalog

OPTIwet ST75 - Spin Wet
Stand alone spinner for wet process
Max. Produktdurchmesser: Ø 750 mm

OPTIwet ST60 - Spin Wet
Stand alone spinner for wet process
Max. Produktdurchmesser: Ø 600 mm

OPTIwet ST30 - Spin Wet
Stand alone spinner for wet process
Max. Produktdurchmesser: Ø 300 mm

OPTIspin ST32+ - Spin Coating
Stand alone spinner system for Coating including process
Max. Produktdurchmesser: Ø 300 mm

OPTIspin ST32 - Spin Coating
Stand alone spinner for coating including process
Max. Produktdurchmesser: Ø 300 mm

OPTIspin ST30 - Spin Coating
Stand alone spinner system for Coating including process
Max. Produktdurchmesser: Ø 300 mm

OPTIspin ST23+ - Spin Coating and Cleaning
Stand alone spinner system for coating and cleaning including process
Max. Produktdurchmesser: Ø 200 mm

OPTIspin ST23 - Spin Coating and Cleaning
Stand alone spinner system for coating and cleaning including process
Max. Produktdurchmesser: Ø 200 mm

OPTIspin ST22+ - Spin Coating and Cleaning
Stand alone spinner system for coating and cleaning including process
Max. Produktdurchmesser: Ø 200 mm

OPTIspin ST22 - Spin Coating and Cleaning
Stand alone spinner for coating and cleaning including process
Max. Produktdurchmesser: Ø 200 mm

OPTIspin ST20 - Spin Coating and Cleaning
Stand alone spinner system including process
Max. Produktdurchmesser: Ø 200 mm

OPTIspin SST20 - Spin Coating and Cleaning
Spin coating and cleaning system inclunding process
Max. Produktdurchmesser: Ø 200 mm

OPTIspin SB30 - Spin Coating
Bench mounted spinner system including process
Max. Produktdurchmesser: Ø 300 mm

OPTIspin SB20 - Spin Coating and Cleaning
Spin coating and cleaning system including process
Max. Produktdurchmesser: Ø 200 mm

OPTIhot VB20 - Hotplate HMDS
Bench mounted HMDS hotplate
Max. Produktdurchmesser: Ø 200 mm

OPTIhot SVT20 - Hotplate HMDS
Stand alone hotplate HMDS
Max. Produktdurchmesser: Ø 200 mm

OPTIhot SHT30+ - Hotplate
Stand alone hotplate
Max. Produktdurchmesser: Ø 300 mm

OPTIhot SHT20+ - Hotplate
Stand alone hotplate
Max. Produktdurchmesser: Ø 200 mm

OPTIhot SHT20 - Hotplate
Stand alone hotplate
Max. Produktdurchmesser: Ø 200 mm

OPTIhot HB30+ - Hotplate
Bench mounted hotplate system including process
Max. Produktdurchmesser: Ø 300 mm

OPTIhot HB20+ - Hotplate
Bench mounted hotplate system including process
Max. Produktdurchmesser: Ø 200 mm

OPTIhot HB20 - Hotplate
Bench mounted hotplate system including process
Max. Produktdurchmesser: Ø 200 mm

OPTIcoat ST75 - Spin Coating
Stand alone spinner for coating including process
Max. Produktdurchmesser: Ø 750 mm

OPTIcoat ST60 - Spin Coating
Stand alone spinner for coating including process
Max. Produktdurchmesser: Ø 600 mm

OPTIcoat ST32+ - Spin Coating
Stand alone spinner for coating including process
Max. Produktdurchmesser: Ø 300 mm

OPTIcoat ST32 - Spin Coating
Stand alone spinner for coating including process
Max. Produktdurchmesser: Ø 300 mm

OPTIcoat ST30 - Spin Coating
Stand alone spinner for coating including process
Max. Produktdurchmesser: Ø 300 mm

OPTIcoat ST23+ - Spin Coating
Stand alone spinner for coating including process
Max. Produktdurchmesser: Ø 200 mm

OPTIcoat ST23 - Spin Coating
Stand alone spinner for coating including process
Max. Produktdurchmesser: Ø 200 mm

OPTIcoat ST22+ - Spin Coating
Stand alone spinner for coating including process
Max. Produktdurchmesser: Ø 200 mm

OPTIcoat ST22 - Spin Coating
Stand alone spinner for coating including process
Max. Produktdurchmesser: Ø 200 mm

OPTIcoat ST20 - Spin Coating
Stand alone spinner for coating including process
Max. Produktdurchmesser: Ø 200 mm

OPTIcoat SST20 - Spin Coating
Stand alone spinner for coating including process
Max. Produktdurchmesser: Ø 200 mm

OPTIcoat SB30 - Spin Coating
Bench mounted spinner system including process
Max. Produktdurchmesser: Ø 300 mm

OPTIcoat SB20 - Spin Coating
Bench mounted spinner system including process
Max. Produktdurchmesser: Ø 200 mm

Maximus 806 - Automatic Cluster
Automatic spinner for Coating including process and micro cluster system
Max. Produktdurchmesser: Ø 200 mm

Maximus 804 Lift-Off - Automatic Cluster
Automatic lift-off cleaning spinner system including process and micro cluster system
Max. Produktdurchmesser: Ø 200 mm

Maximus 804 - Automatic Cluster
Automatic spinner for Coating including process and micro cluster system
Max. Produktdurchmesser: Ø 200 mm

MAXIMUS 6003 - Automatic Cluster
Automatic spinner for Coating including process and micro cluster system
Max. Produktdurchmesser: Ø 600 mm

Maximus 1203 - Automatic Cluster
Automatic spinner for Coating including process and micro cluster system
Max. Produktdurchmesser: Ø 300 mm

DOMINUS Coater ST30i - Spray Coating
Stand alone spray coating system for coating including process
Max. Produktdurchmesser: Ø 300 mm

DOMINUS Coater ST22i - Spray Coating
Stand alone spray coating system for coating including process
Max. Produktdurchmesser: Ø 200 mm

DOMINUS Coater ST20i - Spray Coating
Stand alone spray coating system for Coating including process
Max. Produktdurchmesser: Ø 200 mm